说明
Description Dimension Qty End station 110x94x92 1 Analyzer, Power rack 50x37x89 1 Source teminal 48x69x91 1 Controller rack 61x91x92 1 Pallet-1: End station door, Misc parts etc 103x55x22 1 Pallet-2: Teminal door, Misc parts etc 100x50x24 1 Pallet-3: Top plate, Hood, Misc parts etc 71x43x26 1 Pallet-4: Beam door, stage, Misc parts etc 125x54x29 1 Pallet-5: Front door, Misc parts etc 114x50x17 1 Pallet-6: Fitter cover 76x48x33 1 Pallet-7: Fitter 63x66x55 1 Pallet-8: Stack, Accessories, Controller 47x52x33 1 Pallet-9: Gas box 42x49x59 1 Compressor 1 20x29x30 1 Compressor 2, Rack 20x29x52 1 Chiller 20x29x29 1 PC, Monitor rack 27x40x52 1 SMIF 17x24x75 1 Bottom plate 1 End station Front pannels 36x85x4 1配置
OEM : EATON MODEL : NV-GSD HE VINTAGE : N/A PROCESS: HIGH CURRENT MOVING TYPE: DISK TYPE DRY PUMP : N/A CRYO PUMP : ON BOARD 250F CRYO PUMP ,ON BOARD 10,ON BOARD 8 COMPRESSOR : CTI 9600 , CTI 9600 TMP (TURBO PUMP) :STPH - 2000C CHILLER : RWA-012J-BE07CBD GAS : AR , BF3 , ARSINE , POSPINOEM 型号描述
未提供文件
类别
High Current
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127830
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
AXCELIS
NV GSD III
类别
High Current
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127830
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available