The EHPi-500 with a wider energy range up to 780 keV, 10% higher maximum throughputs, and new statistical process monitoring capabilities. This industry-proven system offers the highest industry throughput and the widest energy range....all in the most reliable medium current system available for features sizes down to 0.18 micron and wafer sizes up to 200mm.

November 10, 2011 – Applied Materials, Inc. announced the successful completion of its acquisition of Varian Semiconductor Equipment Associates, Inc. 
Varian is the leading supplier of ion implantation equipment used by chip makers and has been applying this technology to crystalline silicon wafers for photovoltaic panels. Varian will operate as a business unit of Applied's Silicon Systems Group.

E500-EHPi

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