说明
FIB配置
FIB ●Simple Config ①Stage Type：Side Entry Type A, Eucentric Stage Type E ②Attached holder：μ Sampling Holder, Shared Revolver Holder, Shared Revolver Mesh Holder ●Simple performance： ①Accelerating voltage：10～40kV ②Max beam current：30nA at 40kV ③MAX beam current density：25A/c㎡ at 40kV ④Resolution：6nm at 40kV ⑤Vacuum degree: Ion source room/6×10-6、Sample chamber/6×10-4 ●Audit Result Audit item is Resolution, Magnification, Vacuum degree, Each operation.OEM 型号描述
未提供文件
HITACHI
FB-2100
类别
Inspection Equipment
上次验证： 11 天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
82626
晶圆尺寸：
未知
年份：
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available