说明
无说明配置
Vacuum Chamber: SUS304 φ1550mm×1800mm (H) Substrate Dome Size: φ1400mm Substrate Dome Rotation Speed: 10 rpm to 30 rpm (Variable) Optical Film Thickness Control System: HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance Crystal Film Thickness Monitor: XTC/3 plus 6-point rotary sensor Evaporation Source: EB source: 2 units Ion Source: 23 cm RF ion source Vacuum System: Roughing Pump 2 Diffusion Pumps + Poly cold Power Requirements: 3-phase 200V 50/60Hz 120kVA approx. Cooling Water Flow Rate: 180ℓ/min or greater Compressed Air Pressure: 0.5MPa or greater Gross Weight: 11000kg approx.OEM 型号描述
未提供文件
OPTORUN
OTFC-1550
类别
Ion Beam / IBD
上次验证： 10 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
59518
晶圆尺寸：
未知
年份：
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available