说明
Description Dimension Qty End station 96 x 70 x 100 1 Beam line 97 x 87 x 93 1 Source teminal 96 x 65 x 81 1 Transfomer 35 x 52 x 94 1 Power rack1 27 x 71 x 98 1 Power rack2 35 x 35 x 98 1 Pallet-1: Teminal door, Panel, Misc parts etc 50 x 110 x 29 1 Pallet-2: Transducer MF, Controller, Accel-column 50 x 50 x 43 1 Pallet-3: End station door, Facility1, Misc parts etc 50 x 108 x 29 1 Pallet-4: Beam door, Misc parts etc 50 x 102 x 30 1 Pallet-5: Outer door,Top plate, Misc parts etc 50 x 87 x 30 1 Pallet-6: Power supply, Hood, Misc parts etc 42 x 49 x 34 1 Pallet-7: Lead, Accessory, Misc parts etc 50 x 50 x 15 1 Pallet-8: Helium hose, Cables, Facility2 42 x 73 x 30 1 Pallet-9: Compressor, Transfomer box, Accessory 50 x 50 x 46 1 Pallet-10: Mainframe plate 50 x 97 x 12 1 Pallet-11: Front panel 42 x 112 x 49 1 SMIF 28 x 72 x 87 1 Bottom plate 1配置
PROCESS: MIDIUM CURRENT MOVING TYPE: SINGLE TYPE DRY PUMP : N/A CRYO PUMP : ULVAC (CRYO - U12HL) ,ULVAC (CRYO - U12HSP) COMPRESSOR : CTI 9600 , CTI 9600 TMP (TURBO PUMP) : SHMADZU TMP (MAGNETIC BEARING) CHILLER : NOMAL 1EA GAS : BF3 , ASH3 , PH3OEM 型号描述
未提供文件
类别
Ion Implantation
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127827
晶圆尺寸：
8"/200mm
年份：
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
NISSIN
EXCEED 2000A
类别
Ion Implantation
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127827
晶圆尺寸：
8"/200mm
年份：
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available