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说明
无说明配置
Specifications Details Polishing Plate Outer Diameter 1295 mm Pressure Plate Outer Diameter 485 mm (Standard) Polishing Plate Rotation Speed 20 - 60 min-• Pressure Plate Rotation Speed 20 - 60 min-• Air Cylinder Specifications 140 x 4 pcs Main Equipment Voltage 220/380 V, 3-phase, 60 Hz Control Circuit Voltage 110 v, single-phase, 60 Hz/ DC 24 V Main Motor Power 18.5kW Pressure Plate Drive Motor Power 1.6 kW (0.4 X 4) Breaker Capacity 125 /75 Amps Power Consumption 20.1 kW Air Supply Pressure Requirement 0.6 Mpa (6.0 kg/cm•) Internal Water Supply Pressure Requirement 80 kPa (0.8 kg/cm') Cooling Water Flow Rate 1200 liters/hour External Dimensions (W x D x H) W1675 x D3315 x H2725 mm Machine Weight 7100 kgOEM 型号描述
未提供文件
SPEEDFAM
50
类别
Lapping, Polishing, Grinding
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
117594
晶圆尺寸：
未知
年份：
2014
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Refurbishment Services
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