说明
Equipped With: 48” Diameter Spiral Grooved Diamond Polishing Plate (4) Air Cylinders with Spiral Grooved Pressure Plates Miscellaneous Conditioning Rings 7-1/2 H.P. Main Drive Motor & Controls Presently Wired for 3 phase, 60 cycle, 460 volts Outside Parts Handling Table with Air Lift Adjustment Water Cooled Lap Plate System Full Air Pressure System with Gauges & Controls Automatic Cycle Timer Control Variable Speed Control of the Plate Peristaltic Slurry Pump Unit – Brand New Heavy Duty Welded Frame (2) Ring Alignment (Roller Bearing) Guides Around Lap Table Push Button Control Station Operators & Maintenance Manual配置
General Catalog Specifications: Plate Diameter: 48” Standard Thickness: 1-1/2” Inside Diameter of Rings: 18” Total Ring Area: 1018 Sq. Inches Plate Speed (Variable) Approx.: 0 - 63 R.P.M. Down Pressure Per Head: 1260 Lbs. Cylinder Size (4): 5” Diameter Overall Dimensions Approx.: 84” x 90” x 84”H Weight Approx.: 8,500 Lbs.OEM 型号描述
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无文件
SPEEDFAM
48 BTSW
类别
Lapping, Polishing, Grinding
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
118323
晶圆尺寸：
未知
年份：
2005
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Refurbishment Services
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说明
Equipped With: 48” Diameter Spiral Grooved Diamond Polishing Plate (4) Air Cylinders with Spiral Grooved Pressure Plates Miscellaneous Conditioning Rings 7-1/2 H.P. Main Drive Motor & Controls Presently Wired for 3 phase, 60 cycle, 460 volts Outside Parts Handling Table with Air Lift Adjustment Water Cooled Lap Plate System Full Air Pressure System with Gauges & Controls Automatic Cycle Timer Control Variable Speed Control of the Plate Peristaltic Slurry Pump Unit – Brand New Heavy Duty Welded Frame (2) Ring Alignment (Roller Bearing) Guides Around Lap Table Push Button Control Station Operators & Maintenance Manual配置
General Catalog Specifications: Plate Diameter: 48” Standard Thickness: 1-1/2” Inside Diameter of Rings: 18” Total Ring Area: 1018 Sq. Inches Plate Speed (Variable) Approx.: 0 - 63 R.P.M. Down Pressure Per Head: 1260 Lbs. Cylinder Size (4): 5” Diameter Overall Dimensions Approx.: 84” x 90” x 84”H Weight Approx.: 8,500 Lbs.OEM 型号描述
未提供文件
无文件