说明
Laser System配置
无配置OEM 型号描述
ELS‐4000 is designed and engineered to perform at 400 Hz and 4 W with a narrower spectral bandwidth (2 pm) and a wavelength stability of better than ±0.25 pm. In addition, the pulse‐to‐pulse stability has been improved in stepper‐mode operation. The ELS‐4000 also employs a new microprocessor controlled gas injection system that permits uninterrupted operation for 10–20 h (7–10 million pulses).文件
无文件
类别
Laser
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
21079
晶圆尺寸：
未知
年份：
1993
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML / CYMER
ELS-4000
类别
Laser
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
21079
晶圆尺寸：
未知
年份：
1993
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Laser System配置
无配置OEM 型号描述
ELS‐4000 is designed and engineered to perform at 400 Hz and 4 W with a narrower spectral bandwidth (2 pm) and a wavelength stability of better than ±0.25 pm. In addition, the pulse‐to‐pulse stability has been improved in stepper‐mode operation. The ELS‐4000 also employs a new microprocessor controlled gas injection system that permits uninterrupted operation for 10–20 h (7–10 million pulses).文件
无文件