说明

Included: COHERENT LPXpro 220F (Vintage 2010) Sold as 1 unit!

配置

Complete JPSA IX-260 System includes:• Enclosed Class I Laser Micromachining System• Integrated AC Disconnect Box• All Granite System Includes:• Beam Delivery and Motion stage 100% granite gantry structureo Custom Weldment Frame, includes casters and machine feeto External Laser mounting and integration• High accuracy JPSA crossed-roller micrometer-adjust MicrotechTM camera stage alignmentassembly, optics vertical adjustment of ± 40mm (coarse) / 20mm (fine) range• Variable attenuator, motorized, single plate type (1 wavelength, 248nm)• 248nm optics kit• Inspection system includeso OXC “on-target” real-time corrected CCD viewing system, 0.7X to 5.5X zoom rangeo Second high resolution inspection camerao Video illumination: LED dimmer controlled light unitso Cross Hair Generator• Camera display on PC monitor JPSAControls32 System Control SoftwareIncludes:• Engineer level user interface that provides complete control of all system devices and softwarecomponents for system setup and programming• System configuration editor, for convenient editing of system software settings• Most system functions may be customized by the user through the use of ‘Macro’ scripts, seebelowJPSA SystemControls32 Module, provides:• Advanced project management utilities that permit system software to ‘remember’ settings for anunlimited number of different production tasks. This feature permits the system to be configured formany different tasks. A project manager window allows the user quickly change the system fromjob to anotherJPSATools32 Module, provides:• User access control for three levels: Operator, Maintenance, and Setup• User list editor• JPSA data entry controls used by all JPSA software, consistent user interface across all JPSAsoftware modulesJPSAMotionControls32 Module, provides:• Setup and control of all motion stages including: linear stages, rotary stages, and laser fire axis• Control of complex multi-axis vector motion, including X-Y stage motion with coordinated laserfiringJPSALaserControls32 Module with JPSA Excimer Laser Driver, provides:• Communication with and control of Excimer laser• User interface window for accessing all operation and maintenance functions of the laserJPSAMacroControls32 Module, provides:• High level programming language that permits users to program complex automation sequencesthat integrate motion control, digital I/O, and laser functions and then save them in files• User friendly Macro Editor, features,• Point and click programming – no need to memorize command codes• Drag and drop editing within and between editor windows• Macro Editor may be used to create scripts to customize nearly all JPSA system functionsSecond Generation Six-Axis Motion Control SystemMotion Control Electronics, includes:• PC based motion control card, 6 axes of servo or step motor• JPSA motion amplifier module, includes:o Servo amplifierso Micro-stepping stepping amplifiersX-Y Part Position Stage Air Bearing High Accuracy System Features• High precision JPSA design• Linear scale encoders• Brushless linear motor servo drive system• X-Y Stage Specifications:o Travel: 225x 200mm Travel, configured for up to 4” diameter waferso Resolution: 0.1μmo Accuracy: +/- 3μm accuracy over 150mm of travelo Repeatability: <1μm (bi-directional)• Z -Theta Wafer Alignment Stage:o Motorized Z-Theta system• Z-Axis Specifications:o Travel: 9.0 mmo Resolution: 0.25μmo Accuracy: 2.5 μmo Repeatability: 4.0 μm (bi-directional)• Theta Axis Specifications:o Travel: +/- 175 Degreeso Resolution: 0.001 Degreeso Accuracy: 0.02 Degreeso Repeatability: 0.002 DegreesWafer Chuck• Elevated Vacuum Chuck for 2” or 4” wafers specified by customer at time of order.• Alternate chuck designs available on request• 3-point micro-adjustable leveling system with locking screwsMotorized Variable Attenuator Stage• Step motor drive system• Specifications:o Travel: 90 degreeso Resolution: 0.01 DegreesLaser Fire Axis• Generates TTL pulses to control laser firing while laser is in external trigger mode:• Permits precise control of laser firing, including:• Bursts of laser pulses with accuracy to a single pulse• Laser firing coordinated with part motion with Fire on the Fly for LFOV ProcessingBeam Delivery SystemIncludes:• All Granite Beam Delivery Support Structure• Vibration isolating mounting platform for wafer stages and beam delivery optics• Stiffness and large thermal mass of granite structure prevent changes in beam delivery systemalignment over time.Laser Beam Stop• Computer Controlled Laser Beam StopJPSA Proprietary Optical System, includes:• LFOV Optics Package 3mm x 3mm spot size (5mm Spot Size Optional)• JPSA Precision Grade UV Optics and Optic Mounts for stability and ease of adjustment.• Manual RVA Aperture Mask (Motorized RVA Optional)• Fly-eye HomogenizerDual Beam Profilometer System• CCD camera beam profilometer• Video beam profile capture card and software• Special on target profilometer crystal for process camera target profile viewing• Mask Plane Viewing Profilometer with Pop in Beam SwitcherCoherent Lambda Physik LPXPro Excimer Laser• Factory New Coherent LPXPro Excimer Laser• 248nm Operation • 200 Hz, Max Rep Rate• 550mJ MAX Pulse Energy• Compatible with both Standard LLO and Ostendo Low Stress LLO technology• 2mm x 2mm FOV capability at 1J/cm2JPSA Gas Handling System – Premix Configuration• Ultra high purity semiconductor grade; JPSA excimer designed• Single valve process F2 panel with Deep purge pig tail• Premix Configuration