说明
Cluster Tool Tracks (Resist Coater/Developer)配置
无配置OEM 型号描述
The Polaris 2000 Cluster is a next-generation system introduced by the Microlithography division of FSI near the close of fiscal 1994. The system boasts higher throughput and enhanced productivity, with a new high capacity feature that allows the robotic handler to move horizontally within the cluster and access more modules. The Polaris 2000 Cluster tool is positioned in both the high throughput manufacturing arena and the leading edge high-resolution technology area, making it attractive for customers who require “mix and match” capability in their manufacturing lines.文件
无文件
类别
Lithography
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
113800
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / FSI
POLARIS 2000
类别
Lithography
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
113800
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Cluster Tool Tracks (Resist Coater/Developer)配置
无配置OEM 型号描述
The Polaris 2000 Cluster is a next-generation system introduced by the Microlithography division of FSI near the close of fiscal 1994. The system boasts higher throughput and enhanced productivity, with a new high capacity feature that allows the robotic handler to move horizontally within the cluster and access more modules. The Polaris 2000 Cluster tool is positioned in both the high throughput manufacturing arena and the leading edge high-resolution technology area, making it attractive for customers who require “mix and match” capability in their manufacturing lines.文件
无文件