说明
Details Attached配置
• Diode-pumped solid state laser with 355 nm wavelength - Exposure of standard i-line resists • Automatic handling of 150 mm wafers and 6“ masks • Exposure of substrates with almost arbitrary form factor with manual handling (max. thickness 9 mm) • Maximum exposure area 400 mm x 400 mm • Front to backside alignment possible • 3 exchangeable write heads with different resolution and throughput • Exposure of high topography substrates with special write head with increased working distance • Greyscale lithographyOEM 型号描述
未提供文件
类别
Lithography
上次验证： 20 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
142995
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
HEIDELBERG INSTRUMENTS
VPG 400
类别
Lithography
上次验证： 20 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
142995
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available