概述

Resolution (L/S) (switchable): ≦ 3 µm (i-line), ≦ 3.5 µm (g+h+i-line) Projection magnification: 1:1 Overlay: ≦ ±0.6 µm (3σ) Maximum plate size: 1,500 × 1,850 mm Takt time: 67 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2