说明
Machines - Photo line Exposure Detailed structure of the unit & quantity Detailed Unit Description - PSX1/MSX1/MLX1/PLX1/IUX1 Equipment capabilities Equipment Capabilities - 1.Accuracy (linear correction): ±1.0µm 2. Min line W/S: 3.5µm 3. TP single-point accuracy: ±4µm配置
无配置OEM 型号描述
Resolution (L/S) (switchable): ≦ 3 µm (i-line), ≦ 3.5 µm (g+h+i-line) Projection magnification: 1:1 Overlay: ≦ ±0.6 µm (3σ) Maximum plate size: 1,500 × 1,850 mm Takt time: 67 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2文件
无文件
NIKON
FX-65S
类别
Lithography
上次验证： 12 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
145509
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Machines - Photo line Exposure Detailed structure of the unit & quantity Detailed Unit Description - PSX1/MSX1/MLX1/PLX1/IUX1 Equipment capabilities Equipment Capabilities - 1.Accuracy (linear correction): ±1.0µm 2. Min line W/S: 3.5µm 3. TP single-point accuracy: ±4µm配置
无配置OEM 型号描述
Resolution (L/S) (switchable): ≦ 3 µm (i-line), ≦ 3.5 µm (g+h+i-line) Projection magnification: 1:1 Overlay: ≦ ±0.6 µm (3σ) Maximum plate size: 1,500 × 1,850 mm Takt time: 67 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2文件
无文件