说明
50kV eWrite column technology 50MHz pattern generator 200mm wafer handling capability High throughput single digit nanolithography Stitch-free lithography due to fixed-beam-moving-stage (FBMS traxx) and modulated-beam-moving-stage (MBMS periodixx) technologies配置
无配置OEM 型号描述
The VOYAGER is a dedicated high-performance electron beam lithography system which is especially suitable wherever straightforward access to electron beam lithography in multi-user facilities is needed. The fully automated and ultra-ergonomic system with smart features and innovative system architecture ensures shortest time to result, making it suitable for both academic and industrial environments.文件
无文件
RAITH
VOYAGER
类别
Lithography
上次验证： 29 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
137373
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
50kV eWrite column technology 50MHz pattern generator 200mm wafer handling capability High throughput single digit nanolithography Stitch-free lithography due to fixed-beam-moving-stage (FBMS traxx) and modulated-beam-moving-stage (MBMS periodixx) technologies配置
无配置OEM 型号描述
The VOYAGER is a dedicated high-performance electron beam lithography system which is especially suitable wherever straightforward access to electron beam lithography in multi-user facilities is needed. The fully automated and ultra-ergonomic system with smart features and innovative system architecture ensures shortest time to result, making it suitable for both academic and industrial environments.文件
无文件