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说明
lon implanter配置
无配置OEM 型号描述
The Optima MD is the only low energy, mid-dose ion implanter for all channel engineering applications in the low-dose and mid-dose regimes. The single wafer productivity-driven platform covers traditional medium current processes as well as emerging low energy mid-dose HALO implants.文件
无文件
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AXCELIS
OPTIMA MD
类别
Low Current
上次验证： 60 多天前
物品主要详细信息
状况：
Parts Tool
运行状况:
Deinstalled
产品编号：
113347
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
lon implanter配置
无配置OEM 型号描述
The Optima MD is the only low energy, mid-dose ion implanter for all channel engineering applications in the low-dose and mid-dose regimes. The single wafer productivity-driven platform covers traditional medium current processes as well as emerging low energy mid-dose HALO implants.文件
无文件