说明
Karl SUSS Microtec Aligner; TSA配置
Auto KARL SUSS MA200 MASK ALIGNER consisting of: - MA200CC Main System - Automatic Mask Aligner - Configured for Top Side Alignment - Cassette to Cassette Operation - Up to 8“/200mm wafer capable - Large Clear Field Proximity Maskholder for 9” corner masks, with 8“ exposure area - Vacuum Chuck: 8” Thermal Proximity Chuck - Maskholder: 9“x9” Maskholder - Lamp House: Model LH5000 (5000 Watt) - Power Supply: Suss CIC 5000 Power Supply - UV400 Optics (for 365nm & 405 nm exposure) with G-Line Filter - Objectives: 5x & 10x Objectives - Suss AL3000 Autoalignment System - Suss DVM8 Microscope - Julabo Chiller - Isolation table (included in main body) - Operations Manual for MA200 - Suss 1000 Intensity Meter with 365 & 435 nm probes - Vintage: 2000OEM 型号描述
The SUSS MA 200CC tools are automatic production mask aligners for making MCM-D substrates. They deliver excellent printing results with photo-BCB, a dielectric material used in MCMs. These aligners are suitable for designs as small as 5 microns and meet future photolithography needs in MCM-D technology. Their large depth of focus enables patterning on uneven surfaces.文件
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SUSS MicroTec / KARL SUSS
MA200CC
已验证
类别
Mask Aligner
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
60647
晶圆尺寸:
6"/150mm, 8"/200mm
年份:
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部SUSS MicroTec / KARL SUSS
MA200CC
类别
Mask Aligner
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
60647
晶圆尺寸:
6"/150mm, 8"/200mm
年份:
2000
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Karl SUSS Microtec Aligner; TSA配置
Auto KARL SUSS MA200 MASK ALIGNER consisting of: - MA200CC Main System - Automatic Mask Aligner - Configured for Top Side Alignment - Cassette to Cassette Operation - Up to 8“/200mm wafer capable - Large Clear Field Proximity Maskholder for 9” corner masks, with 8“ exposure area - Vacuum Chuck: 8” Thermal Proximity Chuck - Maskholder: 9“x9” Maskholder - Lamp House: Model LH5000 (5000 Watt) - Power Supply: Suss CIC 5000 Power Supply - UV400 Optics (for 365nm & 405 nm exposure) with G-Line Filter - Objectives: 5x & 10x Objectives - Suss AL3000 Autoalignment System - Suss DVM8 Microscope - Julabo Chiller - Isolation table (included in main body) - Operations Manual for MA200 - Suss 1000 Intensity Meter with 365 & 435 nm probes - Vintage: 2000OEM 型号描述
The SUSS MA 200CC tools are automatic production mask aligners for making MCM-D substrates. They deliver excellent printing results with photo-BCB, a dielectric material used in MCMs. These aligners are suitable for designs as small as 5 microns and meet future photolithography needs in MCM-D technology. Their large depth of focus enables patterning on uneven surfaces.文件
无文件