说明
SUSS MA6 (With IR back microscope)配置
- Wafer Size: Capable of Exposure on Small Pieces up to 6”/150mm Diameter Wafers depending on tooling - Configured for Topside (TSA) Alignment and Bottom Side IR(BSA) - DVM6 - UV400 Optics (for 365nm and 405nm exposure - Includes 5x, 10x, 20x objectives - CIC 1000 Power Supply - 350W Lamphouse - Capable of Soft, Hard, Proximity and Vacuum Contacts (depending on tooling) - Includes (Qty 1) included 6” BSA chuck and mask holder 7 X 7 - Vibration Isolation Table (for SUSS MA6) - System Power: 230V, 50/60 HzOEM 型号描述
The MA6 has upgraded optics designed to output in the mid-UV (250nm) range. The lamp is controlled by a CIC 100 constant intensity controller capable of delivering user-selectable UV doses which remain stable during the life of the lamp. Optical sensors monitor the UV output dose and provide feedback to the controller. There are 2 selectable channels. Both channels operate the lamp near its “idle power” (475W) to maximize lamp life. Because the lamp operates in constant intensity mode, the actual power will vary over time as the lamp ages.文件
无文件
类别
Mask/Bond Aligners
上次验证： 18 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
145113
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SUSS MicroTec / KARL SUSS
MA6
类别
Mask/Bond Aligners
上次验证： 18 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
145113
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
SUSS MA6 (With IR back microscope)配置
- Wafer Size: Capable of Exposure on Small Pieces up to 6”/150mm Diameter Wafers depending on tooling - Configured for Topside (TSA) Alignment and Bottom Side IR(BSA) - DVM6 - UV400 Optics (for 365nm and 405nm exposure - Includes 5x, 10x, 20x objectives - CIC 1000 Power Supply - 350W Lamphouse - Capable of Soft, Hard, Proximity and Vacuum Contacts (depending on tooling) - Includes (Qty 1) included 6” BSA chuck and mask holder 7 X 7 - Vibration Isolation Table (for SUSS MA6) - System Power: 230V, 50/60 HzOEM 型号描述
The MA6 has upgraded optics designed to output in the mid-UV (250nm) range. The lamp is controlled by a CIC 100 constant intensity controller capable of delivering user-selectable UV doses which remain stable during the life of the lamp. Optical sensors monitor the UV output dose and provide feedback to the controller. There are 2 selectable channels. Both channels operate the lamp near its “idle power” (475W) to maximize lamp life. Because the lamp operates in constant intensity mode, the actual power will vary over time as the lamp ages.文件
无文件