The XR120S is a 300mm Batch High Current Ion Implanter from Applied Materials that provides an extended energy range up to 120keV for singly-charged implant species and up to 360keV for multiply charged species. This allows the tool to perform a large number of implants traditionally performed on medium current ion implanters. It also provides a low-risk extension to 300mm with maximum process transparency by sharing a common beamline family with existing 200mm products.

Applied Materials is committed to accelerating this new PPACt playbook for our customers and partners. We have the broadest and deepest portfolio of products for delivering PPACt innovations to the market. This portfolio encompasses the ability to create and deposit, shape and remove, modify, analyze, and connect materials and devices in new ways. We are unique in having a broad suite of process technology and metrology capabilities under one roof, and we have highly differentiated silicon and packaging lab capabilities. Our Integrated Materials Solutions co-optimize materials deposition, removal, modification, and analysis to create new materials and engineer new structures for high-performance, low-power chips at leading-edge nodes.

xR120S

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