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NV 8200P
概述
The SEN CORPORATION / SUMITOMO NV-8200P is a new medium-current implant system from Eaton-SEN. It addresses the need for ultrashallow implants for device manufacturers working with 0.5-micron geometries and below. The system uses a source common with previous generations of Eaton implanters, but has a new design that focuses on reducing contamination.
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