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VIISta 810EHP

概述

The VIISta 810EHP is a single wafer ion implanter manufactured by Varian Semiconductor. It is designed to provide superior overall throughput, precision doping capability, and unmatched contamination control. The tool excels at various types of implants, including Vt, channel, retrograde well, pocket, and halo implants. This makes it a versatile and reliable choice for semiconductor manufacturing.

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