The Filmetrics F80 is a high-speed, small-spot, hyperspectral-imaging film thickness measurement instrument. It performs measurements on patterned wafers up to 200mm in diameter. The hyperspectral imaging system utilizes a revolutionary pattern recognition technique that can distinguish regions in the field of view based on their film stack, composition, and thickness.

KLA Corporation has acquired Filmetrics, Inc. and extends KLA’s instrument solutions with the thin film and Profilm3D products. 

The World's Sales Leader in Thin-Film Thickness Measurement
More companies count on Filmetrics® for affordable thin-film thickness measurements than on anyone else. Makers of cell phones, eyeglasses, liquid-crystal displays, and hundreds of other products appreciate that our devices are easy-to-use, cost less, and are backed with unmatched support. In fact, our customers show us new uses for our thin-film thickness measurement tools every day!

F80

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KLA / FILMETRICS

F80

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