The AlphaStep® D-120 Stylus Profiler is a surface profilometry system designed for engineering and research. It has a 55mm scan length, a Z sensor range up to 1.2mm, and a 200mm motorized sample positioning stage. It offers sub-angstrom resolution, 6 angstrom step height repeatability, and motorized X-Y stages. The system is compatible with Windows XP, Vista, and Windows 7. Its graphical user interface allows for continuous acquisition and display of scan data. Applications include surface texture, precision step height, surface form, thin film stress, biological, MEMS, 3D imaging, and material characterization.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

ALPHA-STEP D-120

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