KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

Tencor P-11 is a surface profiling tool designed for R&D applications. It can analyze surface topography over a 205 mm scan length on various surfaces, including semiconductor wafers and printed circuit boards. Its Open Frame configuration allows for measurement scans of large objects.

P-11

The Alpha-Step 500 is an affordable system for accurately measuring thin step heights on small samples and wafers. Its software can analyze up to 39 surface parameters and display them simultaneously.

ALPHA-STEP 500

The Tencor P2 open frame offers users the flexibility to load samples up to 430mm by 430mm while the Tencor FP2 provides support for the flat panel industry by enabling scans of samples up to 630mm by 630mm.

KLA-Tencor HRP 340 is among the most production worthy metrology solutions in 300mm segment, supporting the most advanced applications including: etch, CMP, and C4 bump monitoring, and more. The 340 series configurations are designed to meet cost, performance, and automation requirements and can be configured as a single open cassette, or dual FIMS for stringent particle requirements. The system utilizes KLA-Tencor's proprietary UltraLite sensor technology for maintaining constant tip-sample forces and vertical linearity over the full Z range. The HRP 340 features a configurable piezo flexure sensor stage for high resolution scans.

HRP-340

The Tencor P2H is the industry’s first profiler to support an automated wafer and disk handler to minimize defects introduced by the operator touching the samples.

P-2H

 Tencor P-10 is an equipment used for research and development engineering that analyzes various substrates, including glass, ceramics, wafers, disks, and precision-machined surfaces. With an optional MicroHead II low-force measurement head, it can accurately measure soft surfaces like indium, gold, and photoresist.

P-10

P-20H

The P-22 is an automated surface profiler that provides comprehensive surface topography analysis for various applications. It has a built-in vibration isolation system and uses KLA-Tencor’s MicroHead II technology for highly repeatable step height measurements. It can handle wafers of different sizes, provides up to 40 key surface parameters, and has GEM/SECS compliant software for fully automated measurements. Data can be exported as ASCII for easy analysis in other applications.

P-22

The Alpha-Step 200 tool releases with 2x faster scanning than the competition, a CRT monitor to display the scan profile, plus computer-controlled automated measurement, leveling and calculations.

ALPHA-STEP 200

The Tencor P-15 is a surface topography measurement system that combines the features of the P-10 and P-11 systems. This advanced system is designed to support both research and development as well as production environments, providing a complete solution on a single platform.

P-15

The P-16™ advanced surface profiler is a benchtop contact stylus profiler designed for automated step height, surface contour, and roughness measurements, and provides detailed 2D and 3D analysis of topography for a variety of surfaces and materials.

P-16

The HRP-220 is a state-of-the-art inline surface metrology tool that features a patented dual-stage stylus profiler. This innovative design combines the long scan stage of the P-22 with a high-resolution piezo stage, allowing for precise measurement and analysis of fine features. Additionally, the HRP-220 is equipped with the DuraSharp stylus, which further enhances its capabilities. This breakthrough technology makes the HRP-220 a leader in its field.

HRP-220

The P-16+ stylus profiler is a surface metrology analysis solution used in a wide range of applications and industries, from R&D; departments and universities to production and process monitoring. This surface analysis solution's precise force control provides excellent vertical resolution, precision, and reliability measurements. This surface analysis solution delivers automated step height analysis, surface contour, waviness and roughness measurements with detailed 2D or 3D analysis of topography for a variety of surfaces and materials.

P-16+

The new Tencor P-7 and P-17 products feature industry-leading measurement precision, the highest resolution color camera available on a stylus platform, and new performance specifications for long-scan capability critical for bow and stress measurements.

P-17

The Alpha-Step IQ takes the proven performance of the Alpha-Step 500 and adds new USB electronics and completely redesigned software to significantly improve the ease-of-use and provide enhanced scan sequencing and data analysis capability.

ALPHA-STEP IQ

The Tencor P-1 Long Scan stylus profiler is the first in the industry to offer ultra-flat 200mm scans in a single profile, without the need to stitch.

The release of the P-1 Long Scan profiler features a revolutionary new design, with industry-first innovations to the scanning stage, optics, and sensor technology-—innovations that provide rock-solid stability, unbeatable sensitivity and repeatability. The system features an ultra-flat scanning stage capable of high-resolution scans up to 200mm in a single scan, enabling characterization of surface roughness, waviness, and thin-film stress. The new stage is also the industry’s first 3D scanning stage, adding a third dimension to characterize surface topography. The system features the first top-view optics to provide a clear view of the sample, free of distortion from the traditional angled side-view. Finally, the sensor technology incorporates the industry’s first and only linear variable differential capacitor (LVDC), resulting in sub-Angstrom electronic resolution with a low moment of inertia, enabling low force control and reducing sensitivity to noise.

ALPHA-STEP 300

Tencor P-12 is a fast, ultra-quiet surface profiling system for magnetic and optical disks, providing accurate measurements with excellent repeatability. Its MicroHead II low-force measurement head can measure finely textured disks at sub-angstrom resolution while preserving the disk’s surface condition.

P-12

The HRP-250 and HRP-350 tools launch with a lower noise LVDC sensor technology, a new isolation system (HRP-350 only) and a redesigned DuraSharp II stylus. These innovations enable measurement of smaller features and nearly 2x the throughput. 

The HRP-350 is an automated, advanced surface topography metrology tool, featuring high resolution/high-aspect ratio, stylus-based surface profiling for leading edge 300mm applications. This surface profile measurement tool's ultra-fine 20nm stylus

HRP-350

The new Alpha-Step 250 features an enhanced sensitivity down to 1 Å, using an acoustic enclosure to isolate the measurement from the environment.

ALPHA-STEP 250	

The Zeta-388 measures patterned sapphire substrates (“PSS”) and inspects for defects on high brightness LED substrates.

Zeta-388

MicroXAM SW-LT	

SIGMASCAN

HRP-100

Zeta-300

The Alpha-Step D-500 and D-600 tools release with the same high-resolution camera as the P-7 and P-17 platforms. They are the only stylus profilers to feature keystone correction, to remove distortion from the side-view optics, and they provide improvements in the optical lever, scanning stage, and isolating heat sources that result in better measurement repeatability.

ALPHA-STEP D-500

The AlphaStep® D-120 Stylus Profiler is a surface profilometry system designed for engineering and research. It has a 55mm scan length, a Z sensor range up to 1.2mm, and a 200mm motorized sample positioning stage. It offers sub-angstrom resolution, 6 angstrom step height repeatability, and motorized X-Y stages. The system is compatible with Windows XP, Vista, and Windows 7. Its graphical user interface allows for continuous acquisition and display of scan data. Applications include surface texture, precision step height, surface form, thin film stress, biological, MEMS, 3D imaging, and material characterization.

ALPHA-STEP D-120

The D-300 system includes an innovative optical lever sensor technology that provides 1000 μm vertical range, sub-Angstrom resolution plus low force, 0.5 to 15 mg. The ability to measure a wide range of applications, from nanometer to millimeter steps, high-resolution roughness, soft materials and thin film stress enable the D-300 to serve various industries in research and development as well as production measurements. The D-300 includes a 140 mm manual stage. The system includes advanced optics, a high-resolution 5 MP camera with a 4x digital zoom and enhanced video controls for highly versatile sample visualization.

ALPHA-STEP D-300

The Zeta-280 adds a single cassette, benchtop handler to the Zeta-200 platform.

Zeta-280

Zeta-600

The Zeta-360 and first-generation Zeta-388 products provide new options for automated wafer handling capability on the Zeta platform.

Zeta-360

The P-260 configuration supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 200mm without stitching. The P-260 achieves excellent measurement stability with a combination of the UltraLite® sensor, constant force control and ultra-flat scanning stage.

P-260

P-22H

In 1994, the Tencor P-20 was introduced as the industry’s first fully automated stylus profiler. This tool was designed to automate the entire process of profiling, from placing the wafer cassette on the tool to obtaining final measurement results. To achieve full automation, the P-20 incorporated pattern recognition and SECS/GEM technology in combination with its existing handler. This allowed for a more efficient and streamlined profiling process.

P-20

The Tencor P-170 combines the performance of the P-17 with the production proven performance of the HRP handler, enabling fully automated measurement capability for the compound semiconductor market.

P-170

XP100

The Tencor HRP-200 High-Resolution Profiler is a fully-automated system that provides global and local analysis of wafer surface topography. It can measure surface topography on both macroscopic and microscopic scales, combining long scans with fine-area analysis of submicron features. It allows process engineers to quickly compare feature depths and relative surface heights. It also combines the measurement repeatability and ease of use of a Tencor stylus profiler with the high-resolution analysis and imaging capabilities of an Atomic Force Microscope (AFM).

HRP-200

In July 2008, KLA launched the P-6 system which provides stylus profiling and analysis of surface topography, for issues such as roughness, film stress and curvature, in an economical benchtop design for samples up to 150mm.

The Zeta-20 is the industry’s first optical profilometer to use ZDot™, a patented technique that combines structured-illumination, confocal optics to generate high-resolution, 3D surface topography data and a True Color image of the surface. This technique enables users to easily focus on any transparent or opaque surface, for fast measurements of step heights and roughness. Multi-mode optics expand the capability of the non-contact 3D surface profiler by combining ZDot with white light interferometry, shearing interferometry, a reflectometer for transparent thin-films, and automated defect inspection.

Zeta-20

The HRP-320 extends the capability of the HRP-220 to 300mm wafers, with the industry’s first and only system capable of measuring the full diameter of a 300mm wafer in a single scan. This tool also offers a dual stage and the first fully automated measurements using a 200mm/300 mm handler system.

HRP-320

The HRP-250 is an automated, advanced surface topography metrology tool, featuring high resolution/high-aspect ratio, stylus-based surface profiling for leading edge 200mm applications. This surface topography metrology tool's ultra-fine 20nm stylus.

HRP-250

The HRP-240 is an automated high-resolution surface metrology tool that provides long scan profilometry and high-resolution imaging for CMP and Etch applications. It has a new Dipping Mode™ capability for high aspect ratio depth monitoring and is reliable and easy to use for high-speed step height monitoring. It is the best solution for topographic metrology for wafer sizes up to 200 mm and can be configured as a basic profiler or a high-resolution, high aspect ratio instrument.

HRP-240

ALPHA-STEP D-100

XP200

The Zeta-200 optical profiler takes advantage of a high-transmission optics design, backside illumination and proprietary algorithms to measure Patterned Sapphire Substrates (PSS). The system can accommodate a variety of PSS bump shapes, measuring the height and pitch of all PSS bumps in the field of view, thus avoiding false bump signatures or results skewed by measuring only a small area. With multi-mode optics, the system is also able to measure thin film thickness and sample bow during PSS manufacturing. Finally, with automated defect inspection, the Zeta-200 can identify defects such as missing bumps, scratches, and particles.

Zeta-200

Zeta-500

Zeta-580

The Alpha-Step® 100 is the first product of Tencor Instruments.

The Alpha-Step provides impressive improvements in step height measurement accuracy and repeatability over the existing competitive products. With its attractive pricing, small form factor, and improved functionality, it is soon considered a critical quality control tool in most semiconductor fabrication plants, or fabs.

ALPHA-STEP 100

The Tencor P-30 replaces the open cassette handler with a SMIF handler and a mini-environment inside the system to support new low particle requirements of the semiconductor industry.

P-30

The HRP-260 was introduced in July 2016 as the latest generation of our HRP (High Resolution Profiler) Series focused on providing both high resolution and high-aspect ratio surface topography profiling to support power device, LED, compound semiconductor and MEMS manufacturing.

HRP-260

ALPHA-STEP D-600

The Zeta-380 combines the benchtop handler from the Zeta-280 with the Zeta-300 platform.

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