说明
无说明配置
Currently configured for 200mm wafer size • Capable of running smaller wafer sizes w/HW change • MFG Date: 2001 • CE Mark • Install Type: Stand-Alone • Cassette Interface: o Open handler with (2) Open Cassette stations PRI/Equipe Wafer Handling Robot w/Dual End-Effector Brooks Pre-aligner: Model PRE-300B-CE • Main Tool: o Spectroscopic Ellipsometer (SE) o Xe - Xenon Light Source o D2 Lamp o Controller Type: PC o Main Computer: 3.5” (1.44MB) Floppy Drive Castlewood Drive (2.2GB) Color VGA Monitor (flat panel) Keyboard/Trackball • Facility Requirements: o CDA o Vacuum (House) o Power: 208VAC, 8.5A, Single Phase, 3-Wire, Freq 50/60 HzOEM 型号描述
The ASET-F5x is a thin film metrology system that can measure materials across a continuous wavelength spectrum from 190 nm to 800 nm. It accurately measures complex multi-layer thin film stacks using spectroscopic ellipsometry and precisely measures advanced, ultra-thin gate dielectric films. It provides the accuracy, repeatability, and system-to-system matching required to monitor advanced ICs with geometries as small as 0.1 micron. Its applications include diffusion films/film deposition, CMP, lithography, and etch.文件
无文件
KLA
ASET-F5x
已验证
类别
Metrology
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
15666
晶圆尺寸:
未知
年份:
2001
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASET-F5x
已验证
类别
Metrology
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
15666
晶圆尺寸:
未知
年份:
2001
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Currently configured for 200mm wafer size • Capable of running smaller wafer sizes w/HW change • MFG Date: 2001 • CE Mark • Install Type: Stand-Alone • Cassette Interface: o Open handler with (2) Open Cassette stations PRI/Equipe Wafer Handling Robot w/Dual End-Effector Brooks Pre-aligner: Model PRE-300B-CE • Main Tool: o Spectroscopic Ellipsometer (SE) o Xe - Xenon Light Source o D2 Lamp o Controller Type: PC o Main Computer: 3.5” (1.44MB) Floppy Drive Castlewood Drive (2.2GB) Color VGA Monitor (flat panel) Keyboard/Trackball • Facility Requirements: o CDA o Vacuum (House) o Power: 208VAC, 8.5A, Single Phase, 3-Wire, Freq 50/60 HzOEM 型号描述
The ASET-F5x is a thin film metrology system that can measure materials across a continuous wavelength spectrum from 190 nm to 800 nm. It accurately measures complex multi-layer thin film stacks using spectroscopic ellipsometry and precisely measures advanced, ultra-thin gate dielectric films. It provides the accuracy, repeatability, and system-to-system matching required to monitor advanced ICs with geometries as small as 0.1 micron. Its applications include diffusion films/film deposition, CMP, lithography, and etch.文件
无文件