The P-22 is an automated surface profiler that provides comprehensive surface topography analysis for various applications. It has a built-in vibration isolation system and uses KLA-Tencor’s MicroHead II technology for highly repeatable step height measurements. It can handle wafers of different sizes, provides up to 40 key surface parameters, and has GEM/SECS compliant software for fully automated measurements. Data can be exported as ASCII for easy analysis in other applications.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

P-22

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Configuration - KLA P-22.pdf

P-22

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