The RS-200 is a resistivity mapping system that provides accurate and reliable sheet resistance measurement for 45 nm and beyond. It has advanced automation, improved edge performance, and is suitable for 300mm wafers. It has patented temperature compensation and easy-to-use software based on Windows XP.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

RS200

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