说明
Tencor / Prometrix RS 35 (RS35) 4PP *. Refurbished *. Installed in Clean-room配置
*. Process: wafer Sheet Resistance measurement *. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range <5 mohm/sq to > 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites - XY map up to 1200 sites programmable *. Measurement Specifications - Measurement repeatability <0.2% ( 1 Sigma) - Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range *. Hardware configuration: - Radial Stage and Probe head Assembly - Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..) - Diagnostics Pannel - DC Power supply - Operator Console with keyboard *. Wafer Size: 2"~ 8" *. Software configuration: - Operation Software: StatTrax *. Utility & power - power requirements 115v 50/60hz - Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHgOEM 型号描述
未提供文件
无文件
KLA
RS35
已验证
类别
Metrology
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
66001
晶圆尺寸：
8"/200mm
年份：
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
RS35
已验证
类别
Metrology
上次验证： 28 天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
66001
晶圆尺寸：
8"/200mm
年份：
1998
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Tencor / Prometrix RS 35 (RS35) 4PP *. Refurbished *. Installed in Clean-room配置
*. Process: wafer Sheet Resistance measurement *. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range <5 mohm/sq to > 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites - XY map up to 1200 sites programmable *. Measurement Specifications - Measurement repeatability <0.2% ( 1 Sigma) - Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range *. Hardware configuration: - Radial Stage and Probe head Assembly - Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..) - Diagnostics Pannel - DC Power supply - Operator Console with keyboard *. Wafer Size: 2"~ 8" *. Software configuration: - Operation Software: StatTrax *. Utility & power - power requirements 115v 50/60hz - Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHgOEM 型号描述
未提供文件
无文件