The HRP-250 and HRP-350 tools launch with a lower noise LVDC sensor technology, a new isolation system (HRP-350 only) and a redesigned DuraSharp II stylus. These innovations enable measurement of smaller features and nearly 2x the throughput. 

The HRP-350 is an automated, advanced surface topography metrology tool, featuring high resolution/high-aspect ratio, stylus-based surface profiling for leading edge 300mm applications. This surface profile measurement tool's ultra-fine 20nm stylus

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

HRP-350

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