说明
2 Loadport with FOUP Capability (Brooks) Loadports Carrier Reader: RFID Type Robot: Brooks Light Source: laser 633 nm HeNe and solid-state 780 nm , and 905 nm UV lamp: 190nm to 400nm Function: Spectroscopic reflectoment covering 190 nm to 905 nm Spot size : 50 μm DUV and 2.5 μm/15 μm /50 μm (high, medium and low magnification) visible /IR Enhanced modulated scanning monochrometer for DUV range OMA detector for the visible/IR range Details Attached配置
Film ThicknessOEM 型号描述
未提供文件
类别
Metrology
上次验证： 5 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
148889
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ONTO / RUDOLPH / AUGUST
S300
类别
Metrology
上次验证： 5 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
148889
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available