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RT-3000
概述
-Wafer handling: Robot up to 300 mm -Inspected area: Full sheet wafers -Probes: 4PP (FEOL & BEOL) , EDDY (BEOL) , JPV (FEOL) -1-4 permanent 4PP heads for different ranges & applications, Lower CoO -Implant dose range: 1012 to 5×1015 1/cm2 -Cleanroom class: class 1 minienvironment
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