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市场 > MOCVD > AIXTRON > AIX G5

AIX G5

类别
MOCVD
概述

The G5 series reactors typically feature AIXTRON's Planetary Reactor technology, which allows for high-quality, uniform growth of films. This is achieved by rotating the substrate wafers around a central point, similar to the planets orbiting the sun, while gases are injected into the chamber.

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