说明
无说明配置
- 8X6 Configuration - Heated exhaust from chamber to filter assembly - Dual filter assembly Inverted and Phoniex filter - VAT Throttle Valve - Extra Pressure sensors for both exhaust streams (Hydride and CL2) - Internal scrubber switching - EPITT Version 2 - EPISON on Dopant MO line plus heating from bubbler to Run/Vent line - Ebara ESA100WN process pump - Two Triscroll pumps: for glovebox and Antechamber - Aixact version 7.6..2.1 - Process module 208VAC, RF Generator 480VAC - No transfer modulesOEM 型号描述
The G5 series reactors typically feature AIXTRON's Planetary Reactor technology, which allows for high-quality, uniform growth of films. This is achieved by rotating the substrate wafers around a central point, similar to the planets orbiting the sun, while gases are injected into the chamber.文件
无文件
AIXTRON
AIX G5
已验证
类别
MOCVD
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
117155
晶圆尺寸：
未知
年份：
2014
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
AIXTRON
AIX G5
类别
MOCVD
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
117155
晶圆尺寸：
未知
年份：
2014
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
- 8X6 Configuration - Heated exhaust from chamber to filter assembly - Dual filter assembly Inverted and Phoniex filter - VAT Throttle Valve - Extra Pressure sensors for both exhaust streams (Hydride and CL2) - Internal scrubber switching - EPITT Version 2 - EPISON on Dopant MO line plus heating from bubbler to Run/Vent line - Ebara ESA100WN process pump - Two Triscroll pumps: for glovebox and Antechamber - Aixact version 7.6..2.1 - Process module 208VAC, RF Generator 480VAC - No transfer modulesOEM 型号描述
The G5 series reactors typically feature AIXTRON's Planetary Reactor technology, which allows for high-quality, uniform growth of films. This is achieved by rotating the substrate wafers around a central point, similar to the planets orbiting the sun, while gases are injected into the chamber.文件
无文件