说明
GaN Epitaxy 6"/8" Bridge tool Min. surface needed: 7113mm x 3665mm including maintenance area配置
Maximum ventilation limit a. N2 b. H2 300slm c. NH3 100 slm d. Space e. SiH4 / H2 ≤ 2% 5slm f. Space g. C2H4 5 slm h. Cl2 3slm i. N2 tech j. Ar Cooling System drawing à Continuous flow of cooling water required, the installation of an emergency cooling circuit is strongly recommended. Operating pressure inside system: max. 6bargOEM 型号描述
未提供文件
无文件
AIXTRON
AIX G5+
类别
MOCVD
上次验证： 13 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
146871
晶圆尺寸：
6"/150mm, 8"/200mm
年份：
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
GaN Epitaxy 6"/8" Bridge tool Min. surface needed: 7113mm x 3665mm including maintenance area配置
Maximum ventilation limit a. N2 b. H2 300slm c. NH3 100 slm d. Space e. SiH4 / H2 ≤ 2% 5slm f. Space g. C2H4 5 slm h. Cl2 3slm i. N2 tech j. Ar Cooling System drawing à Continuous flow of cooling water required, the installation of an emergency cooling circuit is strongly recommended. Operating pressure inside system: max. 6bargOEM 型号描述
未提供文件
无文件