说明
Al, Ta Sputtering Process The C2 is using Ta-Al, Al-Cu targets for PVD sputtering on 6 inches wafers. The film is Ta-Al 1100 Ao, Al-Cu 5200 Ao. The production run rate is 75 wafers every pump down which translates to 2 hrs. Normally the machine can do 5-6 pump down on a 12 hours shift. That translates to about 375-450 wafers output per shift or 750-900 wafers per day. The current layout is Loadlock, Orienter / Desorb, Transport, 2 Process Chambers. More process chambers can be added depending on process needs. Each process chamber is equipped with an on-board 8 CryoPump.配置
-Cassette Load Lock Modules - Come with 3 casettes, a Motion Engineering Inc (MEI) 3 axis single arms robot, - Leybold TMP/NT 150/360V/H turbo pump -Desorb Modules For wafer orientation and lamps heating, Leybold TMP/NT 150/360V/H turbo pump -Transport Modules Brooks MultiTran 5 Bi-symmetric frog-leg type dual arm robot. Leybold TMP 151/361, 600 and 1000 turbo pump. -PVD Cathode AE MDX Magatron Drive Power Supply . CTI cryo on board 8 and 8300 compressor. VAT Gate valve series 14 AlCu target 14” diameter -PVD Cathode Same as 4. TaAl target 14” diameterOEM 型号描述
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.文件
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LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
已验证
类别
MOCVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
45660
晶圆尺寸：
6"/150mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
类别
MOCVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
45660
晶圆尺寸：
6"/150mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Al, Ta Sputtering Process The C2 is using Ta-Al, Al-Cu targets for PVD sputtering on 6 inches wafers. The film is Ta-Al 1100 Ao, Al-Cu 5200 Ao. The production run rate is 75 wafers every pump down which translates to 2 hrs. Normally the machine can do 5-6 pump down on a 12 hours shift. That translates to about 375-450 wafers output per shift or 750-900 wafers per day. The current layout is Loadlock, Orienter / Desorb, Transport, 2 Process Chambers. More process chambers can be added depending on process needs. Each process chamber is equipped with an on-board 8 CryoPump.配置
-Cassette Load Lock Modules - Come with 3 casettes, a Motion Engineering Inc (MEI) 3 axis single arms robot, - Leybold TMP/NT 150/360V/H turbo pump -Desorb Modules For wafer orientation and lamps heating, Leybold TMP/NT 150/360V/H turbo pump -Transport Modules Brooks MultiTran 5 Bi-symmetric frog-leg type dual arm robot. Leybold TMP 151/361, 600 and 1000 turbo pump. -PVD Cathode AE MDX Magatron Drive Power Supply . CTI cryo on board 8 and 8300 compressor. VAT Gate valve series 14 AlCu target 14” diameter -PVD Cathode Same as 4. TaAl target 14” diameterOEM 型号描述
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.文件
无文件