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K465i GaN MOCVD配置
Nexus「CTC flex」 3.05.3.0 IOC N/A PM flex 03.01.00.04 MBTC 2.1.2.324 RT/DRT 3.0.12.0 Epi Viser 6.5.4.0 SQL 10.0.2531.0 Data viewer 1.1.0.3 NRE 3.05.3.0OEM 型号描述
The TurboDisc K465i GaN MOCVD System is a production-proven system that provides high productivity for HB LED high-volume production fabs around the globe. It is known for its highest productivity and best-in-class yields. The K465i achieves up to 90% yield (5nm bin) due to its superior uniformity and excellent run-to-run repeatability. It also offers high productivity due to its full automation and shortened recovery period after maintenance.文件
VEECO
K465i
类别
MOCVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
118320
晶圆尺寸：
未知
年份：
未知
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Refurbishment Services
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