说明
Obducat NIL-4 Nano-Imprinter / Imprint Lithography System配置
The Unit's Serial Number Tag Reads: Type: Imprinter Model Number: NIL-4 Power Requirements: 208 VAC, 3-Phase, 60 Hz Manufacture Date: 2002 CE Marked: Yes The Cooling Bath's Serial Number Tag Reads: Type: CBN 18-30 Serial Number: 802080077 Power Requirements: 230 V ~, 3.4 Amps, 50 Hz, 690 W Refrigerant Type: R 134a Refrigerant Amount: 260 g IP-Class: IP21D CE Marked: Yes The Thermostat's (Part of the Bath) Serial Number Tag Reads: Type: HMT200 Serial Number: 802090177 Power Requirements: 230 V, 50 Hz, 1600 W IP-Class: IP20 CE Marked: Yes Specifications: Stamper: Material: Nickel Thickness: 0.25 - 0.32 mm (Max. 0.65 mm) Outer Diameter: 130 mm +4 mm / -1 mm Flange Position: 134 mm Imprinting Area: ≤ 102 mm Ø Substrate: Material unknown Flexible and rigid Substrate Size: ≤ 200 mm (diameter for round or diagonal for square) Substrate Holder(s): 6 inch diameter for round and flat (flexible and rigid samples) 6 inch diagonal for square (flexible and rigid samples) Two different holders must be provided Manual Material Load: User-friendly method for loading work material onto NIL-4 Sample loader capable of handling flexible and rigid core material in specified sizes Imprinting: Two-sided imprinting Alignment: The two stampers are aligned with an accuracy of 10% of fiducially size with 1 um limitation Alignment module is integrated into the press-head Alignment module is optical Semiautomatic alignment is carried out by means of X, Y, Theta motors Heating of substrate To a max. of 350°C with a temperature setting accuracy ±2.0°C Temperature differences across active surface is within ±0.5% of the temperature Heat-up ramp > 5°C/second Substrate Cooling Capability: Is available Pressure: Max. 60 bar. Demold: NIL-4 has two-sided auto demolding function resulting in no imprint deformation on substrate. Manual Material Unload: Sample unloader is operated manually and safely when material is at high temperatures. Configuration Options: Programmable recipe software: Sequence is: first heat, then press Pressure and position vs. time Closed feedback loop to ensure accuracy Equipment Footprint: ≤ to 1000 mm x 750 mm Environment Limitations: External temperature: 18 - 22°C ±1°C Will require additional cooling for keeping ambient constant Max. relative humidity: 65% Clean Room Performance: Class 10 for press module Class 1000 for rest of NIL equipment Mains Requirements: 208 VAC ±10%, 3-Phase, 60 Hz Markings and Regulations: CE-mark CE approved Mains disconnect switch with lockout / tagout capability Interlocked safety covers restricting access to any hazardous energy, including movement EMOSOEM 型号描述
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OBDUCAT
NIL-4
类别
Nano Imprint Lithography
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled / Uncrated
产品编号：
128803
晶圆尺寸：
6"/150mm
年份：
2002
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Obducat NIL-4 Nano-Imprinter / Imprint Lithography System配置
The Unit's Serial Number Tag Reads: Type: Imprinter Model Number: NIL-4 Power Requirements: 208 VAC, 3-Phase, 60 Hz Manufacture Date: 2002 CE Marked: Yes The Cooling Bath's Serial Number Tag Reads: Type: CBN 18-30 Serial Number: 802080077 Power Requirements: 230 V ~, 3.4 Amps, 50 Hz, 690 W Refrigerant Type: R 134a Refrigerant Amount: 260 g IP-Class: IP21D CE Marked: Yes The Thermostat's (Part of the Bath) Serial Number Tag Reads: Type: HMT200 Serial Number: 802090177 Power Requirements: 230 V, 50 Hz, 1600 W IP-Class: IP20 CE Marked: Yes Specifications: Stamper: Material: Nickel Thickness: 0.25 - 0.32 mm (Max. 0.65 mm) Outer Diameter: 130 mm +4 mm / -1 mm Flange Position: 134 mm Imprinting Area: ≤ 102 mm Ø Substrate: Material unknown Flexible and rigid Substrate Size: ≤ 200 mm (diameter for round or diagonal for square) Substrate Holder(s): 6 inch diameter for round and flat (flexible and rigid samples) 6 inch diagonal for square (flexible and rigid samples) Two different holders must be provided Manual Material Load: User-friendly method for loading work material onto NIL-4 Sample loader capable of handling flexible and rigid core material in specified sizes Imprinting: Two-sided imprinting Alignment: The two stampers are aligned with an accuracy of 10% of fiducially size with 1 um limitation Alignment module is integrated into the press-head Alignment module is optical Semiautomatic alignment is carried out by means of X, Y, Theta motors Heating of substrate To a max. of 350°C with a temperature setting accuracy ±2.0°C Temperature differences across active surface is within ±0.5% of the temperature Heat-up ramp > 5°C/second Substrate Cooling Capability: Is available Pressure: Max. 60 bar. Demold: NIL-4 has two-sided auto demolding function resulting in no imprint deformation on substrate. Manual Material Unload: Sample unloader is operated manually and safely when material is at high temperatures. Configuration Options: Programmable recipe software: Sequence is: first heat, then press Pressure and position vs. time Closed feedback loop to ensure accuracy Equipment Footprint: ≤ to 1000 mm x 750 mm Environment Limitations: External temperature: 18 - 22°C ±1°C Will require additional cooling for keeping ambient constant Max. relative humidity: 65% Clean Room Performance: Class 10 for press module Class 1000 for rest of NIL equipment Mains Requirements: 208 VAC ±10%, 3-Phase, 60 Hz Markings and Regulations: CE-mark CE approved Mains disconnect switch with lockout / tagout capability Interlocked safety covers restricting access to any hazardous energy, including movement EMOSOEM 型号描述
未提供文件
无文件