说明

Construction Features: -Designed with construction features tailored to high temperature operation in Class 10 (M2.5) processing environments. -Number Eight "Mirror" polished stainless steel exterior and interior - including heat shields for safety - minimize room convection currents -All exterior panels fasten with low particle shedding ACME thread screws with Teflon inserts -All bearing surfaces bushed with Teflon - to minimize particle generation -Welded chamber housing - eliminates insulation leakage into facility -Exterior painted surfaces coated with POLANE high gloss polyurethane paint - for easy cleaning and near zero particle generation -Electronics enclosure meets NEMA 12 requirements - eliminates leaking of contaminated air into clean room -Silicone free seals - Teflon inner chamber seals - Viton door seals - Water jacketed door seals to maintain seal integrity High Temperature Class 10 (M2.5) Clean Processing to Minimize Defects: -Fully removable and cleanable inner chamber side walls and plenums -Five sealed thermocouple ports, standard - for product monitoring -Particle sampling port - to assure process control -Exclusive Blue M high temperature recirculating air filtration system - laminar air flow for temperature control - easily removable Class 10 ULPA filter - All circulated air continuously filtered - no use of clean room air - sealed from environment eliminating the risk of facility contamination - ULPA filter is cooled for protection against particle shedding - filter overtemperature protection -Removable stainless steel cooling coil and fittings -Easily accessible heating element package -Horizontal air flow - assures uniform thermal performance under all loading conditions -Inconel sheathed heating elements - for low particle generation -Magnehelic pressure gauge - to measure filter loading -Chamber pressure gauge - assures positive chamber pressure -Exclusive Blue M gas delivery system - gas introduced at the blower shaft insures proper mixing and eliminates the possibility of air being drawn into the chamber - electro polished stainless steel blower wheel to minimize contamination - purge and run flow meters for accurate and complete chamber inerting - suitable for inert gases and non-flammable forming gas (Max. 8% hydrogen) -Direct drive blower - multi-blade centrifugal blower with matched helical scroll - high volume delivery - dynamically balanced for minimum noise and maximum reliability - lifetime lubricated motor

配置

The Unit's Serial Number Tag Reads: Model Number: DCC8-5006 (I believe this 6 is supposed to be a G) Serial Number: DC-786 Temperature Range: 500°C/932°F Power Requirements: 480 V, 3-Phase, 60 Hz, 70 A Specifications: Temperature Range: 15°C above ambient to +500°C (+932°F) Uniformity: ±2% of setpoint Control Accuracy: ±0.5°C Resolution: ±0.1°C or ±1°F Interior Dimensions: 22.0" W x 24.5" D x 25.0" H (59.9 cm x 62.2 cm x 63.5 cm) Interior Volume: 7.8 cubic feet (220.0 liter) Exterior Dimensions: 80.0" W x 40.0" D x 68.0" H (203.0 cm x 101.0 cm x 172.0 cm) Machine Footprint: 22.2 square feet. (205.0 sq. m.) Electrical Requirements: 480 VAC, 3-Phase, 60 Hz, 70 A (per phase) Heater Capacity: 56 kW