说明

Yield Engineering YES-1224P CVD Chemical Vapor Deposition System Hardware Specifications: Clean Room Compatibility: Class 10 Chamber Material: 316L Stainless Steel Chamber Size: 40.6 cm W x 46 cm D x 40.6 cm H (16" x 18" x 16") Overall System Dimensions: 103.5 cm W x 111.1 cm D x 114.46 cm H (40.75" x 42.75" x 45.06") - Light tower increases height 30 cm (11.81") Loading: 4 removable internal stainless steel shelves; up to 16 available configurations Filter: 0.5 Micron filter Mass Flow Controls: Software Specifications: Number of Recipes: 6 CVD, 4 Plasma Range of Exposure Time: 0-999999 Resolution of Timer Setting: 1 second Performance Specifications: RF Plasma Frequency: 40 kHz RF Plasma Power: 10-1000 Watts Operation Temperature: Ambient to 205°C Uniformity: ±5°C during dwell after stabilization period Chemical Usage: Typical process 3-5 ml Chemical Volume Control: Control down to 0.1 ml Process Gas Inputs: 1 Plasma Gas Inputs: 3 Vent Gas Consumption: 10 SCF run average Reactant Gas Consumption: 4.2 x 10-3 SCF (based on standard process: 170°C @ 1000 W w/20 SCFM pump) Wafer Throughput: Typically 1-2 loads/hr; varies by process Slide Throughput: 600 slides/hr for CVD Additional Specifications: Safety: Audible and visual alarms; redundant over-temp monitoring Power Requirements: 208 VAC, 30 A, 60 Hz, Single Phase, 4835 Watts Power Supply: Automatic Frequency Tuning

配置

The Main Unit's Serial Number Tag Reads: Model Number: YES-1224P Part Number: 900-10580-01 Serial Number: 88962 Power Requirements: 208 VAC, 50/60 Hz, Single Phase, 25 FL Amps The RF Generator's Serial Number Tag Reads: Model Number: 3157502-000 F Serial Number: 671232 Revision: F The 1st Pump's Serial Number Tag Reads: Model Number: XDS35i Part Number: A730-01-983 Serial Number: 076013847 The Second Pump's Serial Number Tag Reads: Model Number: PASCAL 2021i Catalog Number: 221AHALZS Serial Number: AM712900 Date of Mfg.: 2012 CE Marked: Yes