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AST-300
类别
Overlay概述
Ultra-fast automated inspection and metrology system; System fully customizable to your exact application. APPLICATIONS: ▪ Wafer/Die level CD (Critical Dimension) Metrology ▪ Precision MEMS & 3D Component Inspection ▪ Advanced Overlay Metrology ▪ VSCEL Aperture Metrology & Inspection ▪ High Speed Probe Card Inspection & Metrology
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