KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

The Archer 500 is a high-performance overlay metrology system for advanced patterning processes. It offers improved precision, measurement speed, and meets strict specifications for overlay error on multi-patterning lithography layers. The Archer 500 utilizes an innovative multi-layer target to provide precise, fast feedback on overlay error. Improvements to the optical subsystems and platform result in better overlay measurement specifications than the previous-generation Archer 300. New illumination options enable overlay measurement capability on a wide range of lithography layers. The Archer 500 is suitable for multi-patterning technologies, in-line monitoring, and scanner qualification. It seamlessly integrates with K-T Analyzer and Recipe Database Manager to improve fab productivity.

KLA

ARCHER 500

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KLA

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