说明
[OPM NEW & 2nd SOURCE NEW ONLY] Technical Specifications: 8-inch AlN Ceramic Heater (PN: 0010-02342) Core Performance & Thermal Properties Wafer Size: Optimized for 200mm (8-inch) semiconductor platforms. Operating Temperature: Recommended up to < 700°C. Thermal Conductivity: High-grade 170 W/m·K for efficient and uniform heat transfer. Thermal Expansion: Coefficient similar to Silicon (Si), minimizing wafer stress and displacement during thermal cycling. Temperature Uniformity: Excellent across the 8-inch surface, ensuring consistent process results. Material & Reliability Material: High-purity Aluminum Nitride (AlN) Ceramic. Plasma Resistance: Excellent durability against aggressive etching and cleaning gases (NF3, CF4, etc.). Anti-Corrosion: Superior chemical resistance for stable performance in harsh vacuum environments. Durability: Robust mechanical design for long-lifecycle performance in 200mm fab lines.配置
无配置OEM 型号描述
Ceramic Heater文件
无文件
类别
Parts
上次验证： 5 天前
物品主要详细信息
状况：
New
运行状况:
Deinstalled
产品编号：
145692
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
0010-02342
类别
Parts
上次验证： 5 天前
物品主要详细信息
状况：
New
运行状况:
Deinstalled
产品编号：
145692
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
[OPM NEW & 2nd SOURCE NEW ONLY] Technical Specifications: 8-inch AlN Ceramic Heater (PN: 0010-02342) Core Performance & Thermal Properties Wafer Size: Optimized for 200mm (8-inch) semiconductor platforms. Operating Temperature: Recommended up to < 700°C. Thermal Conductivity: High-grade 170 W/m·K for efficient and uniform heat transfer. Thermal Expansion: Coefficient similar to Silicon (Si), minimizing wafer stress and displacement during thermal cycling. Temperature Uniformity: Excellent across the 8-inch surface, ensuring consistent process results. Material & Reliability Material: High-purity Aluminum Nitride (AlN) Ceramic. Plasma Resistance: Excellent durability against aggressive etching and cleaning gases (NF3, CF4, etc.). Anti-Corrosion: Superior chemical resistance for stable performance in harsh vacuum environments. Durability: Robust mechanical design for long-lifecycle performance in 200mm fab lines.配置
无配置OEM 型号描述
Ceramic Heater文件
无文件