说明
Number of Chambers 3 (A, B, C, D: 3(A, B, C) Load Locks LL1, LL2: LL1, LL2 Transfer Chamber: Vacuum Robot Process Chambers eXT Metal Etch Chambers: eXT Metal Cu Etch RF Generator: 13.56 MHz / Bias RF Vacuum: Pump Turbo ESC Type: Electrostatic Chuck Temperature: Control Backside He Cooling Endpoint Detection Optical Emission Spectroscopy(if equipped) Factory Interface: EFEM + FOUP Load Ports Communications: SECS/GEM, GEM300 Utilities CDA, N₂, Process Gas, Cooling Water, Vacuum Safety Systems: Gas Monitoring, Interlocks, EMO Chamber Process PM1: Metal Main Etch PM2: Metal Main Etch PM3: Metal Main Etch Chillers: Nil Monitor: 3 sets Does not include: Dry pumps, Chillers, HDD.配置
Process Type: Metal Etch Software Version: -OEM 型号描述
未提供文件
类别
PECVD
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154325
晶圆尺寸：
12"/300mm
年份：
2017
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
PRODUCER EXT
类别
PECVD
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154325
晶圆尺寸：
12"/300mm
年份：
2017
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available