说明
No HDD, No missing parts Missing/Damaged Parts List None report, please inspect tool to reconfirm Dry pumps not included配置
Process: NIT Configured with 3 chambers Technology: PECVD Platform Type: PRODUCER SE System Software System software: B2.4_51 Chamber Configuration Chamber Type: PECVD Lid: none micrometers Lid Mixing Insert: no use Liner: NA Blocker: 0021-12790 Faceplate: 0020-84596 NDIR Endpoint Detector: No Heater: Heater ASSY, HA12, MC, CIP Slit Valve: Valqua Isolation Valve: 0190-08201 Throttle Valve: 0190-12708 Heater Lift Driver: 0190-13840 RPS: 0920-00013 Gas Box Configuration: VCR TYPE FOR MFC Gas Line 1: SiH4 Lo 0.5SLM Gas Line 2: SiH4 2SLM Gas Line 3: empty Gas Line 4: H2 2SLM Gas Line 5: NF3 5SLM Gas Line 6: NH3 0.7SLM Gas Line 7: HE 15SLM Gas Line 8: AR 10SLM Gas Line 9: empty Gas Line 10: N2O Hi 15SLM Gas Line 11: N2O Lo 2SLM Gas Line 12: N2 25SLM Gas Line 13: empty Gas Line 14: empty Gas Line 15: empty Gas Line 16: empty Liquid 1: empty Liquid 2: empty Liquid 3: empty Injector-TEB: empty Injector-TEPO: empty Injector-TEOS: empty Process Pump/Abatement BOC Edwards: Edwards iH1000 Ozone Rack Cooling: N/A Kit Parts: BLOCKER PLATE: 0021-12790 FACE PLATE: 0020-84596 GASBOX: 0040-53688 TOP CERAMIC LINER: 0200-04654 MIDDLE CERAMIC LINER: 0200-02396 BOTTOM CERAMIC LINER: 0200-02397 ALUMINUM PUMPING RING: 0200-02407/0200-02408 VACUUM CHUCK HEATER ASSY: 0010-24300 LIFT PINS: 0200-03269 LIFT RING Captive 300MM PRODUCER SE: N/A LIFT HOOP: 0200-01991 ISOLATOR: 0200-04235 LIFT RING SCREW: 0021-26158 ISO VALVE: 0190-08201 THROTTLE VALVE: 0190-12708 Abatement System Model: 4xinlet Vendor: DAS Heat wrap: 150 Heat Exchanger Model: H2000 Vendor: SMC Thermo Chiller Process Chamber Pump Vendor: Edwards iH1000 Heater Jacket @foreline: Yes Heater Jacket @ exhaust to scrubber: YesOEM 型号描述
The Applied Materials PRODUCER SE is a chemical vapor deposition (CVD) system manufactured by Applied Materials, Inc. It is designed for depositing thin films onto semiconductor wafers in the semiconductor manufacturing process.文件
APPLIED MATERIALS (AMAT)
PRODUCER SE
已验证
类别
PECVD
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
115317
晶圆尺寸：
未知
年份：
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
PRODUCER SE
类别
PECVD
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
115317
晶圆尺寸：
未知
年份：
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available