The Eagle is a single-wafer processing product platform for PECVD applications. The Eagle 12 is for 300mm wafers.

ASM is a supplier of semiconductor process equipment for wafer processing, including lithography, deposition, ion implant and single-wafer epitaxy. ASM is part of the ASM International NV group that also includes ASM Pacific Technology (ASMPT). ASMPT, in which ASMI holds a substantial ownership is a leading supplier of semiconductor process equipment for wafer assembly and packaging, and for surface mount technology.



EAGLE 12

CVD

Tool Info.

Voltage: 208VAC/ Phase: 3P/ Current: 250A/ Frequency: 60Hz
Status: Storing at our facility(under temp & humid control)

[Chamber A, B, C ]
Process: PECVD
Gas Config Maker: Aera FC 786C/ Unit:SLM 
Ar(7), NF3(3), N2O(1), N2O(5), He(4), PN2(6), SiH4(0.6), NH3(3)
RPC : MKS_AX7657 11 (2L)
HF Generator: AD TEC_AX 1000III
LF Generator: AD TEC_AX 1000LFIII

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ASM International Eagle-12.PDF

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ASM International Eagle-12 Config.PDF

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