说明
PECVD配置
[Chamber A] Process: P-TEOS Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000W [Chamber B] Process: P-TEOS Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000W [Chamber C] Process: P-TEOS Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000WOEM 型号描述
The Eagle is a single-wafer processing product platform for PECVD applications. The Eagle 12 is for 300mm wafers.文件
ASM
EAGLE 12
已验证
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
35060
晶圆尺寸：
12"/300mm
年份：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部
ASM
EAGLE 12
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
35060
晶圆尺寸：
12"/300mm
年份：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available