说明
Reactive Ion Etching Machine Frequency: 50/60HZ Voltage: 415VAC 3PHASE Full Load Amps:25.6Amps Machine Main Breaker Rating:32Amps Ampere Rating Of Largest Load:20Amps Interupt Current:4500 A.I.C Configuration: Nitride and Oxide Deposition Batch process tool, 18" platen RF Components: ENI: ACG - 5 XL , RF generator, 13.56MHZ, 500W ENI: LPG - 6A , RF generator, 90kHz to 460kHz, 600W ATX-600 impedence matching network 450mm Platen with 300°C+ heater Windows PC , user friendly interface Gas pod with 6 lines including following MFCs: N2 – 1000sccm N2O – 100sccm N2O – 2000sccm NH3 – 100sccm SiH4 – 2000sccm Gases Previously Used were the Following: N2O , N2, NH3, SiH4 The tool is compact and very simple for operation. Footprint is 36"W x 42"D x 54" H. The chamber is on the top. The power supply, etc. are in the front and accessible behind a stainless steel panel. There is no load lock. You open the chamber, load one or more 4" substrates, close the chamber, and start the chamber pump down. Once the desired vacuum level is achieved, It is ready to run deposition process.配置
Reactive Ion Etching MachineOEM 型号描述
The PlasmaPro 800Plus is a plasma etch and deposition solution that offers a large area for processing. It features an open loading design, making it easy to use and convenient to site, all while maintaining a compact footprint. The system is capable of handling full 300mm wafers or large batches of 43 x 50mm (2”) wafers, thanks to its 380mm or 460mm diameter table. This makes the PlasmaPro 800Plus a well-proven market-leading product that offers full production solutions without compromising on process quality.文件
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Idle
产品编号：
131557
晶圆尺寸：
未知
年份：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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OXFORD
PLASMALAB 800 PLUS
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Idle
产品编号：
131557
晶圆尺寸：
未知
年份：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available