说明
the pc can be power on, but chamber is already vacuum packed配置
OXFORD PlasmaPro 100 PECVD System Deposition lower electrode kit ADVANCED ENERGY / DRESSLER RF 600W Generator AMU Match INFICON 5T CM Gauge kit ALCATEL / ADIXEN / PFEIFFER A604H Pump kit Pump cable, 10 m Isolation valve ALCATEL / ADIXEN / PFEIFFER ACP 15D Dry pump kit Single wafer load lock kit Gas pod (8) Gas lines Gases: SIH4, NH3, GN2, CF4, N2O Mass Flow Controller (MFC) PC Monitor, 19" Power supply: 400 V, 3 Phase, 50 Hz 2018 vintage.OEM 型号描述
The PECVD process modules are specifically designed to produce excellent uniformity and high rate films, with control of film properties such as refractive index, stress, electrical characteristics and wet chemical etch rate.文件
无文件
类别
PECVD
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
139842
晶圆尺寸：
未知
年份：
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
OXFORD
PLASMAPRO 100 PECVD
类别
PECVD
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
139842
晶圆尺寸：
未知
年份：
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
the pc can be power on, but chamber is already vacuum packed配置
OXFORD PlasmaPro 100 PECVD System Deposition lower electrode kit ADVANCED ENERGY / DRESSLER RF 600W Generator AMU Match INFICON 5T CM Gauge kit ALCATEL / ADIXEN / PFEIFFER A604H Pump kit Pump cable, 10 m Isolation valve ALCATEL / ADIXEN / PFEIFFER ACP 15D Dry pump kit Single wafer load lock kit Gas pod (8) Gas lines Gases: SIH4, NH3, GN2, CF4, N2O Mass Flow Controller (MFC) PC Monitor, 19" Power supply: 400 V, 3 Phase, 50 Hz 2018 vintage.OEM 型号描述
The PECVD process modules are specifically designed to produce excellent uniformity and high rate films, with control of film properties such as refractive index, stress, electrical characteristics and wet chemical etch rate.文件
无文件