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PLASMATHERM / UNAXIS VERSALOCK 700
  • PLASMATHERM / UNAXIS VERSALOCK 700
  • PLASMATHERM / UNAXIS VERSALOCK 700
  • PLASMATHERM / UNAXIS VERSALOCK 700
说明
无说明
配置
Process: RIE nitride and oxide. LoadLock: holds 2 cassettes and has a transfer chamber between the 2 process chambers Materials Exposure: Gas and Silicon wafers. Cortex Computer upgrade and software Dual chamber etcher. Has the vortex computer upgrade. System currently installed in Fab and running. 3 Edwards iQDP80 pumps and 2 Neslab chillers.
OEM 型号描述
未提供
文件

无文件

类别
PECVD

上次验证: 3 天前

物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

105078


晶圆尺寸:

4"/100mm, 6"/150mm


年份:

1998


Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

PLASMATHERM / UNAXIS

VERSALOCK 700

verified-listing-icon
已验证
类别
PECVD
上次验证: 3 天前
listing-photo-55f207c0389e4e499fc2d22f3e93ec77-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/4507/55f207c0389e4e499fc2d22f3e93ec77/894dc4bbcfc1411e90f546825084bac9_7058e5803c824fd98025df43f343c1af1201a_mw.jpeg
listing-photo-55f207c0389e4e499fc2d22f3e93ec77-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/4507/55f207c0389e4e499fc2d22f3e93ec77/de4143170e1a4ce0853be04d27b36959_01c2e8a4546042a2ba23a0c7cce8c683_mw.png
listing-photo-55f207c0389e4e499fc2d22f3e93ec77-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/4507/55f207c0389e4e499fc2d22f3e93ec77/7aa649dc5d4c464a82dbf9e9ab8325cd_49024dd00f7f40d7af2f49c5bf7f5d95_mw.png
物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

105078


晶圆尺寸:

4"/100mm, 6"/150mm


年份:

1998


Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明
配置
Process: RIE nitride and oxide. LoadLock: holds 2 cassettes and has a transfer chamber between the 2 process chambers Materials Exposure: Gas and Silicon wafers. Cortex Computer upgrade and software Dual chamber etcher. Has the vortex computer upgrade. System currently installed in Fab and running. 3 Edwards iQDP80 pumps and 2 Neslab chillers.
OEM 型号描述
未提供
文件

无文件