
说明
No missing parts PLC broken down PLC / SW problems Vacuum pump, turbo pump, no chillers配置
Gasses/Process: SiH4/Ar2%, CH4, NH3, N2, O2, Ar, CF4, N2OOEM 型号描述
Plasma Enhanced Chemical Vapor Deposition System文件
无文件
类别
PECVD
上次验证: 27 天前
物品主要详细信息
状况:
Used
运行状况:
Installed / Idle
产品编号:
128488
晶圆尺寸:
8"/200mm
年份:
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PLASMATHERM
Vision 310
类别
PECVD
上次验证: 27 天前
物品主要详细信息
状况:
Used
运行状况:
Installed / Idle
产品编号:
128488
晶圆尺寸:
8"/200mm
年份:
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
No missing parts PLC broken down PLC / SW problems Vacuum pump, turbo pump, no chillers配置
Gasses/Process: SiH4/Ar2%, CH4, NH3, N2, O2, Ar, CF4, N2OOEM 型号描述
Plasma Enhanced Chemical Vapor Deposition System文件
无文件