说明
无说明配置
Form : Load lock Type (Large tray transfer) Substrate Size : 3 ""6"" Wafer (trays : φ 360 Al ) Configuration : Reaction chamber (SUS304 φ 495) Transfer chamber (SUS304 800 x 780) Electrodes : φ 420 mm (aluminum) / Top & Bottom Heating : Stage Heating 300°C Power supply : RF 500 W 13.56MHz Process Gas : 6 systems (SiH4, N2O, CF4, CoF2…) Transfer Robot : Articulated Arm Vacuum Robots (JEL) Vacuum Pump : Dry Pump HR60 (ULVAC) Control system : sequencer Operating inputs : touch panel Recipe : Max. 15 recipes or moreOEM 型号描述
未提供文件
无文件
SAMCO
PD-3800LT
已验证
类别
PECVD
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
26000
晶圆尺寸：
未知
年份：
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SAMCO
PD-3800LT
已验证
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
26000
晶圆尺寸：
未知
年份：
2011
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Form : Load lock Type (Large tray transfer) Substrate Size : 3 ""6"" Wafer (trays : φ 360 Al ) Configuration : Reaction chamber (SUS304 φ 495) Transfer chamber (SUS304 800 x 780) Electrodes : φ 420 mm (aluminum) / Top & Bottom Heating : Stage Heating 300°C Power supply : RF 500 W 13.56MHz Process Gas : 6 systems (SiH4, N2O, CF4, CoF2…) Transfer Robot : Articulated Arm Vacuum Robots (JEL) Vacuum Pump : Dry Pump HR60 (ULVAC) Control system : sequencer Operating inputs : touch panel Recipe : Max. 15 recipes or moreOEM 型号描述
未提供文件
无文件